Information about the sample:

• Shape: Nanowires

• Sample material: SiO2

• Elements: Na,Si, O

• Sample composition: Na

Data acquisition parameters:

• Photon source: Al Ka monochromatic

Equipment information:

• Brand: ThermoFisher

• Model: Alpha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Nanoparticle

• Sample material: SiO2

• Elements: Si,O,Ca

• Sample composition: Ca

Data acquisition parameters:

• Photon source: Al Ka monochromatic

Equipment information:

• Brand: ThermoFisher

• Model: Alpha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Nanowires

• Sample material: SiO2

• Elements: S

• Sample composition: S

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment information:

• Brand: ThermoFisher

• Model: Alpha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Nanowires

• Sample material: SiO2

• Elements: Si,O

• Sample composition: SiO2

Data acquisition parameters:

• Photon source: Al Ka monochromatic

Equipment information:

• Brand: ThermoFisher

• Model: Alpha110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: TiN

• Elements: Al

• Sample composition: TiN

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment information:

• Brand: ThermoFisher

• Model: Alpha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: TiN

• Elements: C

• Sample composition: TiN

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment information:

• Brand: Thermofisher

• Model: Alpha110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: TiN

• Elements: Ti,N

• Sample composition: TiN

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment information:

• Brand: ThermoFisher

• Model: Alpha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: TiN

• Elements: N

• Sample composition: TiN

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment information:

• Brand: Thermofisher

• Model: Alpha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Sample material: TiN

• Elements: O

• Sample composition: TiN

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment information:

• Brand: ThermoFisher

• Model: Alpha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: TiN

• Elements: Ti, N

• Sample composition: TiN

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment information:

• Brand: ThermoFisher

• Model: Alpaha 110

• Spectrometer mode: MONOXPS

• Software used: AAnalyzer